Nanometrology is a subfield of metrology, concerned with the study of estimation at the nanoscale level. 1Nano metrology has an essential role in order to produce nanomaterials and devices with a high degree of accuracy and reliability in nonmanufacturing. The requirements for estimation and portrayal of new example structures and attributes far surpass the capacities of current estimation science. Foreseen progresses in rising U.S. nanotechnology businesses will require progressive metrology with higher goals and exactness than has recently been imagined.